X-Ray Focusing Optics and Its Applications in XRMF and XRL
YIMING YAN, XUNLIANG DING, DACHUN WANG, ANDONG Liu, SHENGJI ZHANG, YEJUN HE, BAOZHEN CHEN, FUZHONG WEI, WEI LIANG, JUN CHEN, AND YICHENG Liu
ABSTRACT
A brief review of the research on capillary x-ray focusing optics (the x-ray lens) at the X-Ray Optics Laboratory of the Institute of Low Energy Nuclear Physics at Beijing Normal University is presented. As a new tool for controlling powerful wide- bandwidth x-ray beams, the x-ray lens has very broad applications in both pure and applied sciences and in industry. Research toward developing such optics continues to grow in Russia, United States, and China. Some applications of x-ray lenses have also been developed. The preliminary results of theoretical and experimental studies on applications of x-ray lenses in x-ray microfluorescence and deep submicron lithography are quite encouraging. These achievements anticipate the appearance of a new generation of x-ray equipment.
Publication Source: Journal of X-Ray Science and Technology, ISSN: 0895-3996. Volume 8, Number 2, 1998. Pages: 1... Publisher:IOS Press - Amsterdam
