Resolution determination in X ray microscopy: an analysis of the effects of partial coherence and illumination spectrum
J.M. Heck, D.T. Attwood, W. Meyer-Ilse and E.H. Anderson
ABSTRACT
Determining the resolution of a zone plate X-ray microscope is a complicated issue, depending on many factors in addition to the quality of the optic. These include the degree of coherence of the illumination, the illumination spectrum, and the nature of the resolution test object. In this paper, we examine closely how the degree of coherence of the illumination affects the resolution as measured with three typical test patterns. In addition, we determine the extent to which the illumination spectrum affects the resolution. We compare X-ray microscope test images to numerical simulations as a function of coherence and illumination spectrum. We are able to conclude that in these experiments, the resolution of the X-ray microscope is 41 nm, or 40% above the diffraction limit, and that this discrepancy is due to aberrations in the objective zone plate lens.
Publication Source: Journal of X-Ray Science and Technology, ISSN: 0895-3996. Volume 8, Number 2, 1998. Pages: 95... Publisher:IOS Press - Amsterdam
