Title: PROCESS CONTROL OF CVD FIBER COATINGS

Abstract:
This work seeks to deposit controlled, reproducible complex oxide fiber coatings (e.g. LaAl₁₁ O₁₈ by MOCVD using in situ sensors and automated process control. A CVD system capable of continuous fiber coating has been assembled in which all of the system parameters are logged by and controllable by computer. In situ measurements are accomplished via a mass spectrometer, laser micrometer, and Raman spectrometer which are integrated into the CVD system. The system employs liquid precursor delivery and inert gas seals for near atmospheric operation. The presentation will describe aspects of the CVD system, sensors, precursors, and control system, as well as discuss coating results.
(Ref. SXVIII-048-97)

Source: NDE of Ceramics '97 May 4-7, Symposium on Nondestructive Evaluation of Ceramics at the American Ceramic Society 99th Annual Meeting, Cincinnati, Ohio.
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