![]() ·Table of Contents ·Industrial Plants and Structures | Automatic Monitoring Systems of Hermetically Equipment's Condition in Chemical PlantsL. Vadim - Nizny Novgorod State Technical University 'RussiaContact |
Apart from classical requirements to responsivity, selectivity and speed of gas monitoring at construction of the distributed automatic detection systems of small concentrations of potentially dangerous mediums the special demands of gas sensors should be made:
To the listed above demands answer gas sensors, manufactured on integral chips technology (on the basis of resistors, diodes, MOS and hybrid structures):
At the heart of microelectronic sensitive element action the series of physical-chemical processes causing an electrical sensor parameters change lays. The active gases detection mechanism influence on behavior of basic gas-sensitive structures indicators (adsorption and desorption times, threshold sensitivity, static characteristic fashion) was investigated in the work.
The detection process generally consists of four stages:
Four different on structure sensors were considered: catalytic thermal, resistive, MOS-structures and sensors on the basis of diodes with a Schottky barrier. Molecular hydrogen was used as active gas.
The catalytic thermal sensor is a film of platinum sputtered on a silicon substrate. The carried out experiments have shown a fast response time of catalytic sensors in microelectronic construction (adsorption and desorption times at effect of hydrogen with concentration of CH2=100ppm have made t a,d» 0.1c).
The resistive metal-oxide semiconductor sensor on the basis of SnO2 becomes hydrogen sensitive at a temperature of Top=520K. It allows assuming, that the sensor operation mechanism is based on a course of physical-chemical reactions on a semi-conductor surface such as Hv+Os2- Þ (HO2-)sÛ (HO)s-+e.
The operation mechanism of heterogeneous structures (MOS-sensors and sensors with a Schottky barrier) is defined by constitution and manufacturing technique. So for Pd-SiO2-Si structures, it is supposed, that on a Pd surface the catalytic reaction of adsorbed H2 molecules dissociation (HÛ H-+e) to atoms is passing which diffuse to the Pd-SiO2 interface and in a consequence of a reaction HÛ H-+e develop a dipole layer changing electro-physical parameters of the sensor. At operating temperatures of Top=370K the hydrogen threshold sensitivity has made CH2min=1ppm (MOS) and CH2min=0.5ppm (a Schottky barrier). The quick-action on forward and back front edges of gas feeding has made about t » 1c.
Fig 1: Dependence of response time on operating temperature of a sensor |
The comparison of dynamic responses of the different microelectronic gas sensors has shown an essential advantage of the sensors with a Schottky barrier. However the greatest opportunities on construction multi-gas sensors have catalytic thermal and resistive structures.
It is obvious, that the development of methods and means of control by penetrating substances is connected directly to creation of new gas-sensitive sensors. Not all sensors are selective and high-sensitive, many do not meet the leak detection requirements, but intensive researches on improvement of parameters of sensors and new perspective materials and equipment continue. Use of modern integrated technique during sensor creation opens perspectives of creation on one substrate not only a system of different sensors allowing a leak determining of several gases, but also intermediate converters and microprocessor which is carrying out an information handling.
Fig 2: Sensor signal processing steps |
Except for immediate leak places localization on working production equipment a task of distribution delimitation of gaseous medium leaks, and also spatial coordinates account of leak sources, which are not in a sensor coverage area, is contained in tasks of the distributed automatic equipment condition monitoring systems. The offered technique is based on distribution simulation of gaseous mediums with use of the differential equation circumscribing a convective diffusion in space:
| (1) |
where E- propagation medium concentration factor; C - detected gas concentration; T- time counted from a leak registration moment; W- convective component of a detected gas mass carry process in an examination zone; D- detected gas diffusivity in air under normal conditions; X - spatial coordinates of an examination zone (x, y, z); l (X) - distribution function of leak sources; Qleak - leak magnitude. The boundary conditions are adjusted in real time in view of static and dynamic characteristics of sensors. Equal concentration lines are plotted with a help of the obtained data array and probable leak epicenter coordinates are determined using a gradient method. The given handling technique allows essentially reducing a number of used leak sensors without monitoring efficiency loss.
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