NDTnet - August 2001, Vol.6 No.8

Cordis Database
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CORDIS Database: RESULTS

Optical characterization of surfaces and films and Atomic Force Microscopy (AFM) 


Record Control Number : 26647
Quality Validation Date : 2001-07-31
Update Date : 2001-07-31
Abstract : The Spectrogoniometer (SGF)  measures specular and diffuse 
		reflectance and transmittance by suing polarized light and by the 
		automatic choice of angular and spectral variables. The 
		Spectoroscopic Ellipsometer (SE)  measures the polarization change 
		after reflection or transmission in a surface structure. Both 
		techniques allow to extract the optical properties of surfaces and 
		films. Typically, ellipsometry is used in the monitoring and 
		characterization of surfaces and films in the semiconductor and 
		optoelectonic industry and also for the control and 
		characterization of optical thin film devices. In research, this is 
		a helpful way to obtain valuable information on several processes 
		in surfaces or films. Spectrogoniometry is not so widely used 
		currently but it is the only choice in several applications. 
		Finally, atomic microscopy allows to measure surface roughness and 
		surface structures with a resolution of ~1 nanometer in height and 
		~0.1 microns laterally. It complements and validates the mentioned 
		optical techniques.
		
		The instrumental equipment brings several advantages. It can afford 
		any optical characterization. The measurements are provided in an 
		automatic way, both angularly and spectrally, allowing to extract 
		the maximum information.
		
		Main Advantages:
		The optical techniques are non-destructive and are ideal in the 
		industrial and research contexts for semiconductors, optical 
		filters, sensors, transparent plastic films and surface physical 
		and chemical properties.
Innovative Aspects : With the use of these optical techniques, Spectroscopic 
		Ellipsometry (SE)  and SpectroGonioPhotometry (SGF)  it is possible 
		to obtain the thickness of films and the optical properties of 
		materials. These properties may be correlated with parameters like 
		degree of mixtures, in homogeneity, anisotropy and surface 
		roughness. The Atomic Force Microscope (AFM)  gives topographic 
		images of the surfaces with a nanometric resolution, informing 
		about roughness, defects and other surface structural features.
Subject Descriptors : Biophysics, Inspection, testing, Materials handling, Method, work study
Subject Index Codes : Life Sciences, Measurement Methods, Industrial Manufacture
Subject Class : Biology, medicine, Materials, industrial manufacturing technologies
Market Applications : Fine chemicals, Industrial chemicals
Remarks : IRC Data: OO/UCM/29
Property Rights : Partnership/other contractual agreement(s)
Collaboration Sought : Licence agreement

Contact Details
  Contact Name : GAYO, Elena (Dr)
  Contact Organisation : D.G. de Investigación de la Consejería de Educación y Cultura de la CAM
  Address : Centro de Enlace para la Innovación
calle Cidacos, 7
  City : Madrid
  Region : COMUNIDAD DE MADRID
  Postcode : 28002
  Country : SPAIN
  Telephone Number : +34-91-7450853
  Fax Number : +34-91-7450863
  Electronic Mailbox : elena.irc@madrimasd.org
 






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