NDT.net - April 2002, Vol. 7 No.04

HNDT Solution for MEMS Testing on Wafer Level

Petra Aswendt, Claus-Dieter Schmidt
Fraunhofer Institute IWU, Reichenhainer Str. 88, 09126 Chemnitz,
Dirk Zielke, Steffen Schubert
GEMAC mbH, Zwickauer Str. 227, 09116 Chemnitz,Germany

1. Introduction

2. Basic approach

3. Finite Element Simulation

4. ESPI Solution

5. MEMS quality testing.

6. Conclusion

7. Acknowledgement

8. References

  1. P. Aswendt: „New approach to the optimization of HNDT applications", Proc. SPIE, 2544, pp. 32-44, 1995
  2. R.Höfling, V.Liebig: C.-D.Schmidt: "Characterization of microvibrations by speckle interferometry", Proc. SPIE, 2545, pp.17-22 ,1995
  3. D. Zielke, J. Frühauf: „Complete simulation support for orientation dependent etched MEMS", MicroSim II, Lausanne, pp. 261-270, 1998
  4. J.N. Butters: „Electronic Speckle Pattern Interferometry: a general review background to subsequent papers" in The Engineering Uses of Coherent Optics, E.R. Robertson (Ed.), Cambridge University Press, Cambridge, 1975, pp. 155-170
  5. O.J. Lřkberg, G.A. Slettemoen: „Basic Electronic Speckle Pattern Interferometry", Applied Optics and Optical Engineering, R.R.Shannon, J.C.Wyant (Eds.), Academic Press, San Diego, 1987, pp. 455-504
  6. P. Aswendt, R. Höfling, K. Hiller: „Testing microcomponents by speckle interferometry" Proc. SPIE, 3825, pp. 165-173, 1999
  7. G. C. Brown, R. J. Pryputniewicz: "Experimental and computational determination of dynamic characteristics of microbeam sensors", Proc. SPIE 2545,, pp. 108-119, 1995
  8. P. Aswendt, R. Höfling: „Interferometrische Dehnungsmessung - Aufbau und Anwendung eines DSPI-Meßsystems", Laser in der Technik (Ed. W.Waidelich), Springer-Verlag, Berlin, 1994, pp.172-175.
  9. R. Höfling, P. Aswendt: „Fiber optic DSPI strain gauge system for engineering applications", VDI Berichte Nr. 118, pp. 51-56, 1994
  10. S. Nakadate, T. Yatagai, H. Saito: "Digital speckle-pattern shearing interferometry", Appl. Opt. 19, pp.4241-4246, 1980
  11. F. Chen, C.T.Griffen, T.E. Allen: „Digital speckle interferometry: some developments and applications for vibration measurement in the automotive industry", Opt. Eng. 37, pp.1390-1397, 1998

This Paper was presented at Fringe 2001 "The 4th International Workshop on Automatic Processing of Fringe Patterns" held in Bremen, Germany, 17-19 September 2001. Proceedings edited by Wolfgang Osten, BIAS, Germany. Please contact Wolfgang Osten for full set of proceedings at wolfgang@uni-bremen.de.

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