NDT.net - April 2002, Vol. 7 No.04

Combined Shearography and Thermography Measurements on Microelectronic Systems

Erwin Hack
EMPA Dübendorf
Überlandstrasse 129, CH-8600 Dübendorf


1. Introduction

2. Experimental set-up

2.1 Shearographic sensor

2.2 Thermoemission microscope

3. Experimental results

4. Conclusion and outlook

5. Acknowledgements

6. References

  1. W. Steinchen, L.X. Yang, and M. Schuth, „TV-shearography for measuring 3D-strains“, Strain 32, 49-57, 1996
  2. Y. Y. Hung, and J. Q. Wang, „Dual-beam phase shift shearography for measurements of in-plane strains“, Opt. Lasers Eng. 24, 403-413, 1996
  3. R. Kästle, E. Hack, and U. Sennhauser, „Multi-wavelength shearography for quantitative measurements of 2D strain distributions“, Appl. Optics 38, 96-100, 1999
  4. T. Siebert, and B. Schmitz, „A new shearing setup for simultaneous measurement of two shear directions“, SPIE, Vol. 3637, 225-230, 1999

This Paper was presented at Fringe 2001 "The 4th International Workshop on Automatic Processing of Fringe Patterns" held in Bremen, Germany, 17-19 September 2001. Proceedings edited by Wolfgang Osten, BIAS, Germany. Please contact Wolfgang Osten for full set of proceedings at wolfgang@uni-bremen.de.

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