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In depth Analysis and Characterisation by Photoacoustic Imagery

Berquez L., Marty-Dessus D., Mousseigne M., Franceschi J.L.
Laboratoire de Genie Electrique - Universite Paul Sabatier
118 route de Narbonne, 31062 Toulouse Cedex
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Abstract

1 Introduction

2 Principle of depth profiling

3 Photoacoustic extraction

4 Experimental result

Conclusion

References

  1. R.J. Von Gutfeld R.L. Melcher. Appl. Phys. Lett., 30:257, 1977.
  2. G.F. Kirkbright M.J. Adams. Analyst, 102:281, 77.
  3. J.L. Franceschi D. Marty-Dessus. Depth profiling by phase shift detection in scanning electron-acoustic microscopy. Electronics Letters, 29(10):843{844, 1993.
  4. S.Y. Zhang L. Cheng. Photoacoustic microscopy (PAM) and detection of subsurface features of semiconductors devices. Ed Mandelis, elsevier edition, 1987.
  5. A. Rosencwaig. Solid Stat Tech., (91), March 1982.

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