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Photoacoustic microscopy of layered structures and subsurface defects of solids

Olena Vertsanova
National Technical University of Ukraine "Kiev Polytechnic Institute", Kiev, Ukraine 03056
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Abstract.

INTRODUCTION

Theoretical model

Discussion

CONCLUSION

REFERENCES

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  2. Mandelis A. Photoacoustic and thermal wave phenomana in semiconductors. - North-Holland, 1989. - 470 p.
  3. Chen Li, Zhang Shu-Yi. Layered imaging for subsurface circuits by photoacoustic microscopy // Acta Acoustica. - 1988. - Vol.13, No. 3. - P. 201-208.
  4. Green R., Jr. Nondestructive evaluation for materials caracterization // Mat. Res. Soc. Symp. Proc. - 1989. - Vol.142. - P. 15-25.
  5. Vaschenko S. M., Blonskij I. V., Puzikov V., M., Dan'ko O. Y. Photoacoustic techniques for determination of thresholds of failure during laser processing of substrute materials for integrated electronics // SPIE. - 1998. - Vol. 3359. - P. 519-522.
  6. Vertsanova O. V., Yakimenko Y. I. Mathematical model of photoacoustic microscopy with pezoelectric detection // Semiconductor Physics, Quantum Electronics and Optoelectronics. - 1999. - V.3. - P. 40-45.

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