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KARL DEUTSCH
INSTRUMENTS AND SYSTEMS FOR NON-DESTRUCTIVE TESTING OF MATERIALS
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Technical Discussions
Duke
Duke
00:24 Aug-31-2000
leakage testing for MEMS packaging

I am looking for a method to test the leakaging rate of the hermetic sealed micro-sensors. The device has a dimension of
1mm x .8mm x 0.5mm with cavity about 0.1 mm^3. My questions are:
1. Is it possible to use He test to check the leakage rate and how to do it?
2. Are there any companies to provide this kind of service?

Your suggestion is higly appreciated!

Duke


 
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