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- since 1996 -
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Technical Discussions
Vasco Teixeira
R & D, coatings production and inspection, stress analysi
University of Minho - Physics Centre, Portugal, Joined Feb 2000, 3

Vasco Teixeira

R & D, coatings production and inspection, stress analysi
University of Minho - Physics Centre,
Portugal,
Joined Feb 2000
3
08:53 Feb-26-2001
elastic parameters and quality control of PVD thin films

Dear colleagues,

I would like to know (and share some informations)concerning the amount of money involved in industry/ R&D institutes(europe and USA) to :
develop NDT systems for quality inspection of sputtered and physically vacuum deposited thin films for optical, microelectronic and mechanical industry.
and, for speciall systems to control residual stresses and elastic properties of as-deposited thin films and coatings on components in on-line coating production.

Thanks for any help

All the best

Vasco

vasco@fisica.uminho.pt
fax: +351 253 678 981
phone: +351 253 604334/20



 
 Reply 
 
Dr. Patel ND
Dr. Patel ND
01:41 May-02-2001
Re: elastic parameters and quality control of PVD thin films
: Dear colleagues,
.
: I would like to know (and share some informations)concerning the amount of money involved in industry/ R&D institutes(europe and USA) to :
: develop NDT systems for quality inspection of sputtered and physically vacuum deposited thin films for optical, microelectronic and mechanical industry.
: and, for speciall systems to control residual stresses and elastic properties of as-deposited thin films and coatings on components in on-line coating production.
.
: Thanks for any help
.
: All the best
.
: Vasco
.
: vasco@fisica.uminho.pt
: fax: +351 253 678 981
: phone: +351 253 604334/20
.
We are measuring stress in situ on metal and metal alloys and perhaps if you can send us more information on substrate and film thickness and what magnitude of stresses are imposed than we can help you as we have our own ultrasonic system which can measure stresses on thin materials.

Regards

Dr.Patel


 
 Reply 
 
Colin Nicolson
Colin Nicolson
05:34 Jul-04-2001
Re: elastic parameters and quality control of PVD thin films
A good method to control sputtered stress if use a substrate bias. This will tune the amount of gas incorporated into the film. Stress can be changed from tensile to compressive by varying the bias.

Sputter systems are commercially available for this type of applications. Papers and information of potential metals and there properties are hard to come by.

Colin Nicolson.
Process Engineer
Kymata Ltd.



 
 Reply 
 

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