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138 views
09:48 May-06-2005
Sony George
Help regarding mems


This is the design part of a MEMS pressure sensor. Here it uses the back side pressurized technique and it applied by a fluid inlet. According to pressure the membrane will move upward. On the top side there will be a optical fiber through which light is fall over the center of the membrane. When no pressure is applied the membrane will be in zero deflection condition and the light from the fiber will get reflected from the maximum distance. When pressure applies the movement of the membrane causes the decrease (d) in the distance between the light source and the sensor



 


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